FREMONT, CA–(Nov 20, 2013) – Mattson Technology Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment for the manufacture of semiconductors, announces that its new paradigmE XP etch system has been qualified for advanced DRAM device technologies. In order to support customer requirements, the paradigmE XP system was qualified for production use and additional systems were manufactured, shipped and installed at a customer wafer fabrication facility within the same quarter, demonstrating Mattson’s technical and operational agility to support the growing demands for our products.

“Our customer selected the paradigmE XP system based on meeting their stringent device technology requirements while achieving competitive cost of ownership. These results were achieved with our most advanced, proprietary, plasma source, which we believe offers process performance comparable to the industry’s leading edge offerings,” said Rene George, Vice President and General Manager of Mattson Technology’s Plasma Products Group. “After a rapid and intense qualification, we have installed multiple systems to support wafer fab mass production. We continue to develop additional process applications on the paradigmE XP to offer the advantages of our state of the art technology and industry leading productivity to not only our memory customers, but our foundry and logic customers as well.”

In describing the impact of this performance on the company, President and CEO Fusen Chen said, “Mattson has demonstrated its ability to respond quickly to customer requirements and capture new market opportunities. Current engagements in similar projects across all of our product lines are expected to enable us to continue our profitable growth through the current cycle.”

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Etch, Rapid Thermal Processing and Millisecond Anneal. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

“Safe Harbor” Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements regarding the company’s financial and operational performance, technology and ability to convert new market opportunities, plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company’s products; customer acceptance of delivered products and the Company’s ability to collect amounts due upon shipment and upon acceptance; the Company’s ability to timely manufacture, deliver and support ordered products; the Company’s ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company’s competitors; the Company’s ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company’s Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Investor Contact
J. Michael Dodson
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fax +1-510-492-5963